Materials Analysis

Hard Disc
･This is an application data of Hard Disc after leaving it in a cleanroom.
･DOP is a plasticizer of polymer, and this data shows that hard disc is adsorbed selectively with DOP.
･Organic matters control will be available by measuring the organic components which is easy to be
adsorbed to Devices.

Filter
･This is an application of Filter currently used in general Clean room.
･There are a lot of TBP and BHT came out from the Filter.
･It is said that an organic matter may affect various Devices.
･As an example, it is said that TBP or BHT is influenced to the above Hard Discs.

Print Board
･D5 and D6 is Siloxane.
･It can check what tends to adhere to a printed circuit board.
･It can check that Siloxane of the organic matters in materials is easy to adhere to print circuit board.

Air Analysis

Lab. Atmosphere Data (Draining Tube Use)
･This data was measured by TMD253H on Air measurement of general indoor analysis (lab near the R&D lab).
･Organic matters in air can be measured.

Cleanroom Atmosphere Comparison Data
･These three (3) data are air measurements in three different cleanroom air.
･Each cleanroom obtains different data.
･Since Data C was a clean room of Photo Resist, the organic matters of solvent group was detected.
･By using TMD, the organic matters of Cleanroom Air are controlled.
･The organic matter ingredient which is easy to adhere to devices by this can be specified.
･The volume can be qualitative and quantitative.
･This becomes the material for full preparation on organic matters control.