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Outgas released from LSI Materials

Category Document No. Column Related Documents
GC GA062 InertCap 1MS  

Compounds | Keywords

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Compounds

  • Di(2-ethylhexyl)adipate(DOA)
  • Di-n-butyl adipate (DBA)
  • Triphenyl phosphate
  • Tris(2-chloroethyl)phosphate
  • Tri-n-butyl phosphate
  • Butylated hydroxytoluene(BHT)
  • Diethyl phthalate (DEP)
  • Di-n-butyl phthalate
  • Di(2-ethylhexyl)phthalate
  • Dodecamethyl cyclohexasiloxane

Keywords

clean roomsemiconductoratmosphereSVOCplasticizerflame retardantantioxidantoutgassingInertCap 1MS